Chew, S.A.
Publications
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Issue Date | Title | Author(s) | |
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1 | 2006 | TCAD simulation of local mechanical stress reduction by use of a compressive silicon nitride/silicon oxynitride etch stop bi-layer for CMOS performance enhancement | Ahmad, W.R.W. ; Kordesch, A.V. ; Ahmad, I. ; Chew, S.A. ; Yew, P.T.B. |
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Full Name
Chew, S.A.
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