Magnetic field measurements for N2 and H2 discharges from a low frequency RF inductively coupled plasma source

Please use this identifier to cite or link to this item: http://dspace.uniten.edu.my/jspui/handle/123456789/5748

DC Field	Value	Language
dc.contributor.author	Chakrabarty, C.K.	en_US
dc.date.accessioned	2017-12-08T06:45:51Z	-
dc.date.available	2017-12-08T06:45:51Z	-
dc.date.issued	2006	-
dc.description.abstract	The electric field due to a strong capacitive coupling between the induction coil and the walls of the plasma chamber is quite large despite the discharge being in the H-mode in N2 and H2 gases. And as such, this field will interfere with the measurement of the magnetic field thus causing a high degree of measurement error. This paper hence describes the use of a centre-tapped coiled magnetic probe for the measurement of magnetic field profiles in 1-D in the low frequency RF inductively coupled plasma source. From these profiles, an independent method to determine the average electron density is also shown. © 2006 Elsevier Ltd. All rights reserved.	en_US
dc.language.iso	en_US	en_US
dc.relation.ispartof	Measurement: Journal of the International Measurement Confederation Volume 39, Issue 8, October 2006, Pages 736-739	en_US
dc.title	Magnetic field measurements for N2 and H2 discharges from a low frequency RF inductively coupled plasma source	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1016/j.measurement.2006.03.003	-
item.fulltext	No Fulltext	-
item.grantfulltext	none	-
Appears in Collections:	COE Scholarly Publication

Check