Universiti Tenaga Nasional Library
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Browsing by Author Shi, K.W.
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
|---|---|---|
| 2015 | Multi beam laser grooving process parameter development and die strength characterization for 40nm node low-K/ULK wafer | Shi, K.W. ; Yow, K.Y. ; Lo, C. ; Kar, Y.B. ; Misran, H. |
| 2017 | Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer | Shi, K.W. ; Kar, Y.B. ; Talik, N.A. ; Yew, L.W. |