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Browsing by Author Yusri, A.
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| Issue Date | Title | Author(s) |
|---|---|---|
| 2006 | The characterization of KrF photoresists and the effect of different chromophore bulkiness on line edge roughness (LER) for submicron technology | Yusri, A. ; Bakri, M. ; Manaf, M.J. ; Wahab, K.I.A. ; Ahmad, I.B. |