Universiti Tenaga Nasional Library
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Browsing by Author Chew, S.A.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 2006 | TCAD simulation of local mechanical stress reduction by use of a compressive silicon nitride/silicon oxynitride etch stop bi-layer for CMOS performance enhancement | Ahmad, W.R.W. ; Kordesch, A.V. ; Ahmad, I. ; Chew, S.A. ; Yew, P.T.B. |