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|Title:||Magnetic field measurements for N2 and H2 discharges from a low frequency RF inductively coupled plasma source||Authors:||Chakrabarty, C.K.||Issue Date:||2006||Journal:||Measurement: Journal of the International Measurement Confederation Volume 39, Issue 8, October 2006, Pages 736-739||Abstract:||The electric field due to a strong capacitive coupling between the induction coil and the walls of the plasma chamber is quite large despite the discharge being in the H-mode in N2 and H2 gases. And as such, this field will interfere with the measurement of the magnetic field thus causing a high degree of measurement error. This paper hence describes the use of a centre-tapped coiled magnetic probe for the measurement of magnetic field profiles in 1-D in the low frequency RF inductively coupled plasma source. From these profiles, an independent method to determine the average electron density is also shown. © 2006 Elsevier Ltd. All rights reserved.||DOI:||10.1016/j.measurement.2006.03.003|
|Appears in Collections:||COE Scholarly Publication|
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